The SPTS division of KLA, designs, manufactures and markets wafer processing solutions for the global semiconductor and related industries. SPTS provides industry leading etch and deposition process technologies on a range of single wafer handling platforms. End-market applications include micro-electromechanical systems (MEMS), advanced packaging, LED, high speed RF device ICs and power semiconductors. SPTS is part of KLA Corporation which develops industry-leading equipment and services that enable innovation throughout the electronics industry. We provide advanced process control and process-enabling solutions for manufacturing wafers and reticles, integrated circuits, packaging, printed circuit boards and flat panel displays. In close collaboration with leading customers across the globe, our expert teams of physicists, engineers, data scientists and problem-solvers design solutions that move the world forward.
Group/Division
SPTS wafer processing solutions include market-leading silicon etch, dielectric etch, dry-release etch, PVD, PECVD and molecular vapor deposition (MVD), availab...